RFID technology empowers semiconductor wafer box storage cabinets to achieve identification

In order to improve the country's core competitiveness in the strategic high-tech industry of chips, cities and localities have introduced investment attractions, introduced outstanding semiconductor-related enterprises, and provided strong supporting policies. As a result, the domestic semiconductor industry will surely usher in substantial development. After in-depth research and development experiments, an RFID amplifier unit suitable for managing semiconductor wafers has been developed, providing domestic semiconductor companies with a stable, reliable, and cost-effective RFID identification solution. At the same time, it enriches the RFID application scenarios in the domestic semiconductor industry, such as the RFID integrated CID carrier reader and writer, which realizes the needs of accurate information collection and one-to-one counter management of wafer box storage cabinets. The specific implementation methods are as follows:

The RFID carrier reader is deployed under each support plate of the storage cabinet. When the wafer box is placed into the alignment column of the storage cabinet, infrared rays trigger the RFID carrier reader to enter the identification state and immediately identify the wafer box. CID carrier, the system can determine whether the wafer cAssette is placed correctly, determine whether the wafer cassette is in the cabinet, etc. Combined with the temperature, humidity, oxygen and nitrogen sensors of the storage cabinet, the environmental management and counter management of the wafer cassette can be realized and information management.

The wafer cassette storage cabinet of a photomask company in Guangzhou uses RFID Readers. The on-site installation diagram shows:

relative devices

V610

The V610 semiconductor RFID reader is small, lightweight and can be installed flexibly. It supports 134.2kHz operating frequency, adopts HDX half-duplex data transmission mode, supports standard modbus RTU protocol, and integrates the radio frequency communication protocol internally. It is easy to use and operate without understanding complex radio frequency communication protocols.

V640

V640 is a semiconductor RFID reader developed for the semiconductor manufacturing industry. It adopts HDX half-duplex data transmission mode, supports SECS protocol and Modbus RTU protocol, complies with world SEMI standards, is compatible with CID carriers produced by TI, and has excellent reading and writing reliability. It has good performance and environmental resistance, and supports the IO signal of external photoelectric switch to trigger card reading.

Realize benefits

1. Avoid limited placement height and quantity caused by human factors, and use space more accurately;

2. Avoid manual errors, time-consuming and other problems;

3. All material flows can be tracked;

4. Keep track of the access status of wafer chips;

5. Reduce pollution and keep the wafer clean;

6. Improve the automation management level of the semiconductor industry.