Advantages and Challenges of RFID Application in Semiconductor Electronic Shelves

(1) The full life cycle data of each wafer box (such as etching cycle, cleaning times) needs to be recorded in real time through RFID tags.

(2) When the FOUP is placed incorrectly (such as the wafer enters the deposition area after CMP), the system immediately triggers an audible and visual alarm and locks the shelf operation authority.

Solution

(1) Install RFID Readers on semiconductor electronic shelves. When the wafer box is placed on the shelf, the reader triggers the antenna to read the tag through infrared sensing, collects information and displays the product type in real time on the front display. It can also display when the wafer box is removed, realizing real-time update of inventory information. This function allows inventory management personnel to quickly grasp the number and type of wafer boxes on the shelf without manually scanning one by one, greatly shortening the inventory time and improving the accuracy and timeliness of inventory data.

(2) Install RFID tags on wafer boxes to record the production process and test results. Once a quality problem occurs, it can be quickly traced back to the specific batch and production link, providing a basis for quality improvement. Through the RFID system, semiconductor companies can establish a complete wafer quality traceability system. From raw material procurement, production and processing to finished product delivery, the information of each link is accurately recorded in the label. When quality problems occur, companies can quickly locate the source of the problem and take appropriate measures to rectify it, effectively reducing quality risks and improving product quality and customer satisfaction.