Wafer handling robots and RFID semiconductor card readers work together to enable efficient transformation of semiconductor manufacturing

The semiconductor production environment is extremely special. It needs to be carried out in a dust-free, constant temperature and humidity clean room to ensure that the wafer is not contaminated and the yield rate of chip manufacturing is guaranteed. At the same time, the wafer handling process involves frequent material identification, positioning and precise operation. Traditional manual handling is not only inefficient, but also prone to human errors and contamination risks. As the industry's requirements for production capacity and quality continue to rise, automated and intelligent wafer handling systems have become an inevitable trend.

Application Solution The handling robot tranSports the FOUP (Front Opening Unified Pod) carrying the wafer to the storage area. The card reader installed at the robot arm or the entrance of the storage shelf quickly reads the RFID tag information on the FOUP, which records the wafer's batch, specifications, production time and other detailed data. This information is uploaded to the factory management system (MES) in real time. The system assigns storage locations to wafers according to preset rules and updates the inventory database. Before the introduction of this solution, a semiconductor factory could only handle 30 FOUPs per hour in manual warehousing operations, and the error rate was about 5%. After the robot and S654 card reader work together, 80 FOUPs can be processed per hour with an accuracy rate of nearly 100%, which greatly improves the efficiency of warehousing and the accuracy of inventory management.

Application scenario: Throughout the entire process of semiconductor manufacturing On the production line, the handling robot accurately transports the wafers to each processing equipment according to the instructions of the MES system. At the entrance of the equipment, the S654 card reader reads the label information again to confirm whether the wafer identity matches the processing flow. If it matches, the equipment starts processing; if it does not match, the system immediately issues an alarm to avoid incorrect processing. Taking the photolithography process as an example, the robot transports the wafer to the photolithography machine, and the S654 card reader quickly checks the wafer information to ensure that the photolithography machine loads the correct photolithography pattern and process parameters. This process not only improves production efficiency, but also reduces processing errors caused by human negligence, and increases the yield rate of the photolithography process from 90% to more than 95%. After completing all processing procedures, the handling robot transports the wafer to the outbound area. The S654 card reader reads the tag information and compares it with the production records in the MES system. After confirmation, the wafer is shipped out. At the same time, all data in the production process, including processing parameters, equipment information, operators, etc., are Stored in association with the wafer tag information. Once a product has a quality problem, it can be quickly traced back to the source of production through the tag information, analyze the cause of the problem, and take corresponding improvement measures. The combination of the wafer handling robot and the Morning Control S654 semiconductor card reader brings efficient, accurate and reliable material handling and information management solutions to the semiconductor manufacturing industry. By optimizing the production process, improving production efficiency and product quality, and reducing production costs, it has effectively promoted semiconductor manufacturing to move towards intelligence and automation.

The application product S654 is tailored for industrial automation and semiconductor fields. CK-S654-PA60 is a low-frequency RFID tag reader based on radio frequency identification technology. Its operating frequency is 134.2kHz, which complies with ISO11784/11785 standards. It has excellent anti-interference ability and can work stably in semiconductor workshops with complex electromagnetic environments. This card reader has a multi-antenna design, supports up to four antennas, supports time-division multiplexing operation, and can control up to four Library-borrowing-machine-touch-query-intelligent-terminal-all-in-one-machine.html target='_blank'>workstations at the same time, greatly improving the efficiency and flexibility of the equipment. For example, in the connection between the wafer storage area and the processing area, through the multi-antenna configuration of S654, it can read the information of multiple wafer carriers at the same time and quickly dispatch the handling robot to perform tasks. In terms of communication interface and protocol, it provides multiple interfaces such as RS232, RS485, RJ45, supports industrial protocols such as SECS, HSMS, modbusRTU/TCP, and can be easily integrated into semiconductor controllers or PLC systems, allowing users to complete tag reading through simple data interaction without in-depth understanding of complex radio frequency communication protocols.