Application of RFID technology in semiconductor Wafer wafer box

Wafe is a wafer, which is a silicon wafer used to make silicon semiconductor circuits. Wafer boxes mainly play the role of placing and transporting Wafer wafers in semiconductor production, which can simplify transportation and reduce the risk of contamination. The application of RFID technology in semiconductor wafer wafer boxes can improve the work efficiency of the semiconductor manufacturing industry, reduce workers' direct contact with wafer wafers, and greatly reduce the risk of wafer wafers being contaminated during production or transportation. .

The application of RFID technology on Wafe wafer cAssettes is mainly reflected in the implantation of TI tags on the wafer cassettes. RFID semiconductor readers and writers are installed on corresponding Library-borrowing-machine-touch-query-intelligent-terminal-all-in-one-machine.html target='_blank'>workstation nodes according to different application scenarios to read Wafe wafers. The TI label on the box obtains Wafe wafer information to facilitate orderly arrangement of the next process operation.

Wafe wafer storage cabinet

The RFID semiconductor reader is embedded into the storage cabinet's carrying platform. When the wafer box is placed in the storage cabinet, the RFID semiconductor reader identifies the TI glass tube label, obtains the wafer information, and confirms whether the wafer box is Stored correctly. At the same time, the storage location of the wafer is recorded, so that the stored wafer can be found immediately when necessary.

Semiconductor electronic shelves

Install the RFID semiconductor reader behind the electronic shelf identification position. When the wafer box is placed or leaves the identification position, the RFID semiconductor reader determines whether the wafer box is at the identification position by identifying the TI tag on the induction wafer box, and records the time when the wafer box is placed/leaved. . When the wafer box is in the identification position, the RFID semiconductor reader will identify and display the sensed wafer box information (such as the size and type of the wafer box, etc.) on the display at the front of the electronic shelf.

Semiconductor flower basket transportation

The RFID semiconductor reader is installed under the carrying platform of the AGV trolley that tranSports the wafer box, and is used to identify and upload the wafer box information on the AGV trolley. The management system issues corresponding instructions to the AGV car based on the obtained wafer information, such as warehousing or moving to the warehouse for processing.

Semiconductor silicon wafer cleaning

When the wafer box is sent to the cleaning station, the RFID semiconductor reader deployed above the station will obtain the type, size and other information of the wafer in the wafer box by identifying and reading the information of the TI tag, and record it. Please record the type, size, cleaning time, etc. of this wafer to prevent process confusion.

Semiconductor crane transportation

When the overhead truck transports the Wafer wafer box, the semiconductor RFID Reader receives relevant information from the TI tag carrier tag to ensure that the Wafe wafer box being transported is accurate. When traveling to the corresponding storage/placement location, the semiconductor RFID reader recognizes the tag information of the destination again, and places the Wafe wafer box that matches the information in the corresponding location. At the same time, it will obtain all the information when placing it. Upload to the management system. If there are defective products or other defective products, the production and transportation process of the product can be traced based on these data, helping to quickly locate the problem point.