RFID reader application for FOUP wafer cassettes: CK-S650 drives the upgrade of the entire wafer handling process

In semiconductor manufacturing, wafers are the core carriers of chip production. Every handling of wafers is crucial for nanometer-level precision process control and zero-defect quality assurance. With the increasing production capacity of 12-inch wafers and the widespread adoption of advanced processes, management bottlenecks in traditional wafer handling are becoming increasingly prominent: the risk of dust contamination from optical identification in cleanrooms, information gaps in multi-equipment collaboration, and inefficiencies in full-process traceability under SEMI standards. Against this backdrop, semiconductor-specific RFID technology, with its cleanroom-grade design, contactless precision identification, and highly secure data exchange capabilities, has become a key infrastructure for overcoming capacity bottlenecks and building intelligent traceability systems.

Application Solutions

Tag Binding, Zero Data Error: ● Tags are embedded on the side of the FOUP (form-oriented unit) and a unique ID is written using a card reader. This automatically links wafer batch information (diameter, material, etc.) and synchronizes with the MES system in real time, eliminating manual data entry errors. ● Equipment Transfer: Seamless Integration Improves Efficiency: Readers are installed at AMHS track nodes to identify FOUPs as they pass by and automatically invoke the corresponding process recipe. ● Quality Traceability: Abnormalities are quickly located. Defect data is automatically recorded at the inspection equipment exit, enabling real-time diversion of failed products. When an abnormality occurs, the associated wafer is located, improving reverse traceability efficiency.

Application Products

The CK-S650 series of RFID Readers, developed and manufactured specifically for the semiconductor manufacturing industry, features: ● Multiple antenna options: A variety of identification antennas meet different identification distance requirements. ● Comprehensive interfaces and protocols: RS485 and Ethernet. Supports standard industrial semiconductor HSMS and modbus protocols. ● Convenient operation: The reader integrates the RF communication protocol. Users only need to send and receive data via the RS485 communication interface to complete tag reading operations, eliminating the need to understand complex RF communication protocols. ● Compatible: Compatible with a variety of semiconductor chips.